Please use this identifier to cite or link to this item:
doi:10.22028/D291-24400 | Title: | Fine patterning of thin sol-gel films |
| Author(s): | Krug, Herbert Merl, Norbert Schmidt, Helmut K. |
| Language: | English |
| Year of Publication: | 1992 |
| OPUS Source: | Journal of non-crystalline solids. - 147/148. 1992, S. 447-450 |
| SWD key words: | Dünne Schicht Sol-Gel-Verfahren Prägen Ormocer |
| DDC notations: | 620 Engineering and machine engineering |
| Publikation type: | Journal Article |
| Abstract: | An embossing technique was used to fabricate surface reliefs in organically modified ceramics of the Ormocer type, synthesized via the sol-gel route. Embossing techniques for these materials are described and results of embossed grids and gratings with up to 2400 lines/mm and peak-to-trough values up to 3 µm are presented. |
| Link to this record: | urn:nbn:de:bsz:291-scidok-27054 hdl:20.500.11880/24456 http://dx.doi.org/10.22028/D291-24400 |
| Date of registration: | 17-Feb-2010 |
| Faculty: | SE - Sonstige Einrichtungen |
| Department: | SE - INM Leibniz-Institut für Neue Materialien |
| Collections: | INM SciDok - Der Wissenschaftsserver der Universität des Saarlandes |
Files for this record:
| File | Description | Size | Format | |
|---|---|---|---|---|
| sm199207.pdf | 793,39 kB | Adobe PDF | View/Open |
Items in SciDok are protected by copyright, with all rights reserved, unless otherwise indicated.