Please use this identifier to cite or link to this item:
doi:10.22028/D291-24173
Title: | Geração de máscaras em escala nano e micrométrica por litografia eletrônica |
Other Titles: | Mask generation of nano and micrometric scale by electron litography |
Author(s): | Silva, Marcelo A. P. Nastaushev, Y. Basmaji, P. Rossi, J. C. Aegerter, Michel A. |
Language: | (Other) |
Year of Publication: | 1994 |
OPUS Source: | Anais / 38° Congresso Brasileiro de Cerâmica; 2° Encontro de Mineradores e Consumidores : [18 a 21 de junho de 1994, Blumenau, SC] / Associação Brasileira de Cerâmica. - Vol. 1. - São Paulo, SP : Associação Brasileira de Cerâmica, 1994, S. 144-148 |
SWD key words: | Elektronenstrahllithographie Elektronenstrahl Polymerfilm Ätzen Substrat <Chemie> Substrat <Mikroelektronik> |
DDC notations: | 500 Science |
Publikation type: | Conference Paper |
Abstract: | - The electron beam lithography has been used to generate masks at nano and micrometric scale using polymeric films deposited on a substrate. The film is degraded by the electron beam at the desired regions and developed in a suitable solution. The result is a polymeric mask which can be used to generate on the substrate a region with the same geometric shape using metallic deposition or chemical etching. The polymeric film is then removed leaving the desired surface structure on the substrate. In this work we used the electronic beam of a Scanning Electron Microscope ZEISS DSM 960 to obtain a mask consisting of a matrix of spots with submicrometric period of 300 nm on GaAs surfaces and to optimize the experimental parameters for its realization. |
Link to this record: | urn:nbn:de:bsz:291-scidok-23580 hdl:20.500.11880/24229 http://dx.doi.org/10.22028/D291-24173 |
Date of registration: | 4-Sep-2009 |
Faculty: | SE - Sonstige Einrichtungen |
Department: | SE - INM Leibniz-Institut für Neue Materialien |
Collections: | INM SciDok - Der Wissenschaftsserver der Universität des Saarlandes |
Files for this record:
File | Description | Size | Format | |
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AEG232.pdf | 2,67 MB | Adobe PDF | View/Open |
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