Please use this identifier to cite or link to this item:
doi:10.22028/D291-23831 | Title: | A simple model for stress voiding in passivated thin film conductors |
| Author(s): | Lloyd, J. R. Arzt, Eduard |
| Language: | English |
| Year of Publication: | 1992 |
| OPUS Source: | Materials reliability in microelectronics II : symposium held April 27 - May 1, 1992, San Francisco, California, U.S.A. / ed.: C. V. Thompson ... - Pittsburgh, Pa. : Materials Research Society, 1992. - (Materials Research Society symposium proceedings ; 265), S. 45-50 |
| SWD key words: | Beanspruchung Modell Konduktor |
| DDC notations: | 620 Engineering and machine engineering |
| Publikation type: | Conference Paper |
| Abstract: | A model is proposed for stress voiding in passivated thin film conductors. The rate limiting step is argued to be the formation of vacancies at dislocation jogs which then diffuse to void sites. |
| Link to this record: | urn:nbn:de:bsz:291-scidok-17869 hdl:20.500.11880/23887 http://dx.doi.org/10.22028/D291-23831 |
| ISBN: | 1-558-99160-3 |
| Date of registration: | 3-Dec-2008 |
| Faculty: | SE - Sonstige Einrichtungen |
| Department: | SE - INM Leibniz-Institut für Neue Materialien |
| Collections: | INM SciDok - Der Wissenschaftsserver der Universität des Saarlandes |
Files for this record:
| File | Description | Size | Format | |
|---|---|---|---|---|
| ea199210.pdf | 1,59 MB | Adobe PDF | View/Open |
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